Parts For Sale TEGAL 46-971-001 TEGAL 46-971-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-971-001 Manufacturer TEGAL Part Number 46-971-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 47-155-001 40-374-006 46-787-002 40-140-001 RING, CERAMIC INSULATOR 47-639-001 99-287-003 SHUTTLE INTERFACE BOARD 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 47-080-003 47-733-001 150 mm 150 mm 25 slot Aluminum wafer carrier.
