Parts For Sale TEGAL 46-971-001 TEGAL 46-971-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-971-001 Manufacturer TEGAL Part Number 46-971-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 39-680-003 ELECTRODE, CONEHEAD VENTED 80-195-450 51-056-001 42-826-005 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 47-006-002 40-140-001 RING, CERAMIC INSULATOR 47-161-001 39-733-004 Tegal 903e lower electrode 37-175-001A 150 mm 150 mm 25 slot Aluminum wafer carrier.
