Parts For Sale TEGAL 46-961-001 TEGAL 46-961-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-961-001 Manufacturer TEGAL Part Number 46-961-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 52-058-002 31-406-003 WAFER SENSOR ASSY-VCE 80-650-053 ACTUATOR 47-339-005 52-050-001 52-041-001 47-105-001 40-304-001 ELECTRODE, INSULATOR LOWER 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 58-046-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 47-445-001