Parts For Sale TEGAL 46-960-002 TEGAL 46-960-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-960-002 Manufacturer TEGAL Part Number 46-960-002 Description Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 9.0 US Other TEGAL Parts 47-339-005 52-050-001 99-287-003 SHUTTLE INTERFACE BOARD 39-733-004 Tegal 903e lower electrode 52-041-001 47-105-001 58-046-001 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 47-445-001