Parts For Sale TEGAL 46-960-002 TEGAL 46-960-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-960-002 Manufacturer TEGAL Part Number 46-960-002 Description Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 9.0 US Other TEGAL Parts 39-853-005 38-023-001 COOLING RING 80-195-450 51-056-001 42-826-005 47-006-002 40-140-001 RING, CERAMIC INSULATOR 47-161-001 40-260-001 WINDOW, SAPPHIRE 1x2.5 37-175-001A 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%