Parts For Sale TEGAL 46-939-005 TEGAL 46-939-005 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-939-005 Manufacturer TEGAL Part Number 46-939-005 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 37-181-001 39-756-003 74-101-001 47-583-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-956-001 47-695-001 39-733-004 Tegal 903e lower electrode 80-202-297 BELT 1/4W 115GRV 80-202-297 A4T1 PAD ETCHER TEGAL 903E 40-304-001 ELECTRODE, INSULATOR LOWER 80-202-357 O-Ring 50-056-001