Parts For Sale TEGAL 46-939-005 TEGAL 46-939-005 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-939-005 Manufacturer TEGAL Part Number 46-939-005 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 46-1006-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 47-473-001 39-741-026 Tegal 903e lower electrode 40-707-001 47-519-001 39-639-001 51-189-001 52-048-001 37-221-001 UPPER ELECT, .014 HOLE NO RAD.