Parts For Sale TEGAL 46-887-002 TEGAL 46-887-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-887-002 Manufacturer TEGAL Part Number 46-887-002 Description Status Available Approx. Qty 36 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 36.0 US Other TEGAL Parts 58-073-001 37-221-002 UPPER ELECT ANOD, NON ANODIZED 99-247-003 SPATULA INTERFACE 38-023-001 COOLING RING 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 47-339-005 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 47-101-002 39-894-001 99-287-003 SHUTTLE INTERFACE BOARD 52-047-002