Parts For Sale TEGAL 46-882-001 TEGAL 46-882-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-882-001 Manufacturer TEGAL Part Number 46-882-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 46-994-002 80-650-053 ACTUATOR 47-526-001 93-229-005 RF CABLE 901E 51-191-001 46-786-001 47-672-001 80-095-278 DAC SCAN BOARD 40-576-003-C Ring Ceramic Focus Castellated 52-059-001 150 mm 150 mm 25 slot Aluminum wafer carrier.