Parts For Sale TEGAL 46-878-001 TEGAL 46-878-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-878-001 Manufacturer TEGAL Part Number 46-878-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL 47-634-001 31-406-003 WAFER SENSOR ASSY-VCE 37-411-001 54-011-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 37-605-001 58-043-004 47-474-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 39-741-009 Tegal 903e lower electrode 37-221-001 UPPER ELECT, .014 HOLE NO RAD.