Parts For Sale TEGAL 46-871-001 TEGAL 46-871-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-871-001 Manufacturer TEGAL Part Number 46-871-001 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 40-768-004 Insulator Ring 80-650-053 ACTUATOR 83-259-001 80-195-450 51-056-001 42-826-005 47-006-002 47-161-001 37-175-001A 40-576-003-C Ring Ceramic Focus Castellated 37-221-001 UPPER ELECT, .014 HOLE NO RAD.
