Parts For Sale TEGAL 46-854-001 TEGAL 46-854-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-854-001 Manufacturer TEGAL Part Number 46-854-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 40-768-006 Insulator Ring 93-229-005 RF CABLE 901E 80-195-450 51-056-001 42-826-005 47-006-002 47-161-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 37-175-001A 150 mm 150 mm 25 slot Aluminum wafer carrier.
