Parts For Sale TEGAL 46-851-001 TEGAL 46-851-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-851-001 Manufacturer TEGAL Part Number 46-851-001 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 51-251-001 51-092-001 74-124-005 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 39-741-026 Tegal 903e lower electrode 40-140-001 RING, CERAMIC INSULATOR 51-259-001 47-261-002 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 52-175-001