Parts For Sale TEGAL 46-682-003 TEGAL 46-682-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-682-003 Manufacturer TEGAL Part Number 46-682-003 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 52-058-002 51-251-001 51-092-001 74-124-005 93-229-005 RF CABLE 901E 40-140-001 RING, CERAMIC INSULATOR 51-259-001 39-741-009 Tegal 903e lower electrode 47-261-002 39-735-004 Tegal 903e lower electrode 52-175-001 150 mm 150 mm 25 slot Aluminum wafer carrier.