Parts For Sale TEGAL 46-682-003 TEGAL 46-682-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-682-003 Manufacturer TEGAL Part Number 46-682-003 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 47-445-001 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 47-339-005 52-050-001 93-123-006 BELT 52-041-001 47-105-001 80-202-357 O-Ring 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 58-046-001