Parts For Sale TEGAL 46-674-001 TEGAL 46-674-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-674-001 Manufacturer TEGAL Part Number 46-674-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 52-058-002 31-406-003 WAFER SENSOR ASSY-VCE 40-467-001 47-339-005 47-101-002 39-894-001 52-171-001 52-047-002 40-304-001 ELECTRODE, INSULATOR LOWER 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL