Parts For Sale TEGAL 46-674-001 TEGAL 46-674-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-674-001 Manufacturer TEGAL Part Number 46-674-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 99-247-003 SPATULA INTERFACE 38-023-001 COOLING RING 80-650-053 ACTUATOR 80-195-450 51-056-001 42-826-005 47-006-002 47-161-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-741-009 Tegal 903e lower electrode 99-249-002 PCB TEGAL END POINT DETECTOR 37-175-001A