Parts For Sale TEGAL 46-671-001 TEGAL 46-671-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-671-001 Manufacturer TEGAL Part Number 46-671-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 40-768-004 Insulator Ring 47-158-002 40-395-001 RING, FLAT 6 52-050-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 46-925-001 39-733-004 Tegal 903e lower electrode 46-774-001 52-041-001 99-249-002 PCB TEGAL END POINT DETECTOR 47-445-001