Parts For Sale TEGAL 46-669-004 TEGAL 46-669-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-669-004 Manufacturer TEGAL Part Number 46-669-004 Description Status Available Approx. Qty 11 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 11.0 US Other TEGAL Parts 58-073-001 46-879-001 74-101-001 40-467-001 39-894-001 39-956-001 39-733-004 Tegal 903e lower electrode 40-576-003-C Ring Ceramic Focus Castellated 37-222-002 Cooling Plate 150 mm 150 mm 25 slot Aluminum wafer carrier.
