Parts For Sale TEGAL 46-642-001 TEGAL 46-642-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-642-001 Manufacturer TEGAL Part Number 46-642-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 31-406-003 WAFER SENSOR ASSY-VCE 80-195-450 51-056-001 42-826-005 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 47-006-002 47-161-001 37-175-001A 80-202-357 O-Ring 37-222-002 Cooling Plate