Parts For Sale TEGAL 46-642-001 TEGAL 46-642-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-642-001 Manufacturer TEGAL Part Number 46-642-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 40-768-006 Insulator Ring 47-155-001 46-1006-001 40-374-006 46-787-002 46-912-002 39-741-026 Tegal 903e lower electrode 47-639-001 47-080-003 40-576-003-C Ring Ceramic Focus Castellated 40-304-001 ELECTRODE, INSULATOR LOWER
