Parts For Sale TEGAL 46-406-002 TEGAL 46-406-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-406-002 Manufacturer TEGAL Part Number 46-406-002 Description Status Available Approx. Qty 12 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 12.0 US Other TEGAL Parts 58-073-001 80-650-053 ACTUATOR 93-229-005 RF CABLE 901E 40-467-001 47-339-005 47-101-002 39-894-001 52-047-002 40-576-003-C Ring Ceramic Focus Castellated 150 mm 150 mm 25 slot Aluminum wafer carrier.