Parts For Sale TEGAL 46-322-001 TEGAL 46-322-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-322-001 Manufacturer TEGAL Part Number 46-322-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 47-634-001 40-395-002 Ring Ceramic 125C Castellated 39-680-003 ELECTRODE, CONEHEAD VENTED 31-406-003 WAFER SENSOR ASSY-VCE 46-776-003 54-011-001 37-605-001 58-043-004 47-474-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.