Parts For Sale TEGAL 46-321-001 TEGAL 46-321-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-321-001 Manufacturer TEGAL Part Number 46-321-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 47-445-001 40-768-004 Insulator Ring 33-349-004 ELECTRODE, CONDEHEAD UPPER 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 39-680-003 ELECTRODE, CONEHEAD VENTED 47-339-005 52-050-001 52-041-001 47-105-001 58-046-001 50-056-001