Parts For Sale TEGAL 46-282-001 TEGAL 46-282-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-282-001 Manufacturer TEGAL Part Number 46-282-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 39-680-003 ELECTRODE, CONEHEAD VENTED 31-406-003 WAFER SENSOR ASSY-VCE 47-339-005 52-050-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-733-004 Tegal 903e lower electrode 93-123-006 BELT 52-041-001 47-105-001 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 58-046-001 47-736-001