Parts For Sale TEGAL 46-278-004 TEGAL 46-278-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-278-004 Manufacturer TEGAL Part Number 46-278-004 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 33-349-004 ELECTRODE, CONDEHEAD UPPER 51-251-001 51-092-001 74-124-005 93-229-005 RF CABLE 901E 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 47-261-002 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 46-556-002 52-175-001