Parts For Sale TEGAL 46-173-001 TEGAL 46-173-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-173-001 Manufacturer TEGAL Part Number 46-173-001 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 55-008-001 BELT SPAT 150 mm 150 mm 25 slot Aluminum wafer carrier. 47-634-001 31-406-003 WAFER SENSOR ASSY-VCE 46-776-003 54-011-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 58-043-004 47-474-001 46-272-003