Parts For Sale TEGAL 46-173-001 TEGAL 46-173-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-173-001 Manufacturer TEGAL Part Number 46-173-001 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 33-349-004 ELECTRODE, CONDEHEAD UPPER 47-339-005 52-050-001 52-041-001 47-105-001 40-576-003-C Ring Ceramic Focus Castellated 58-046-001 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL 47-445-001