Parts For Sale TEGAL 46-149-003 TEGAL 46-149-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-149-003 Manufacturer TEGAL Part Number 46-149-003 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 93-229-005 RF CABLE 901E 40-467-001 47-339-005 47-101-002 39-894-001 99-287-003 SHUTTLE INTERFACE BOARD 52-171-001 52-047-002 150 mm 150 mm 25 slot Aluminum wafer carrier.