Parts For Sale TEGAL 46-147-002 TEGAL 46-147-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-147-002 Manufacturer TEGAL Part Number 46-147-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 40-768-006 Insulator Ring 47-339-005 52-050-001 40-295-003 FOCUS RING 93-123-006 BELT 80-202-297 BELT 1/4W 115GRV 80-202-297 A4T1 PAD ETCHER TEGAL 903E 52-041-001 47-105-001 58-046-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 47-445-001