Parts For Sale TEGAL 46-141-004 TEGAL 46-141-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-141-004 Manufacturer TEGAL Part Number 46-141-004 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 58-073-001 37-221-002 UPPER ELECT ANOD, NON ANODIZED 39-756-003 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 47-339-005 39-741-026 Tegal 903e lower electrode 47-101-002 39-894-001 99-287-003 SHUTTLE INTERFACE BOARD 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 52-047-002