Parts For Sale TEGAL 46-141-004 TEGAL 46-141-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-141-004 Manufacturer TEGAL Part Number 46-141-004 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 40-768-006 Insulator Ring 38-023-001 COOLING RING 47-339-005 52-050-001 93-123-006 BELT 52-041-001 47-105-001 80-871-146 CABLE MTCH NTWK INSTALLATION POSSIBLE ON: TEGAL 903 OPM: ... 58-046-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 47-445-001