Parts For Sale TEGAL 46-141-004 TEGAL 46-141-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-141-004 Manufacturer TEGAL Part Number 46-141-004 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 38-023-001 COOLING RING 47-155-001 40-374-006 46-787-002 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 46-912-002 47-639-001 39-761-001 47-080-003 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 37-222-002 Cooling Plate 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL