Parts For Sale TEGAL 46-1030-001 TEGAL 46-1030-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-1030-001 Manufacturer TEGAL Part Number 46-1030-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 40-768-006 Insulator Ring 39-680-003 ELECTRODE, CONEHEAD VENTED 51-259-003 51-191-001 46-786-001 52-050-001 52-167-001 58-046-001 50-056-001 150 mm 150 mm 25 slot Aluminum wafer carrier.