Parts For Sale TEGAL 46-1030-001 TEGAL 46-1030-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-1030-001 Manufacturer TEGAL Part Number 46-1030-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-053-001 80-195-450 51-056-001 00-0917-2 5" GUIDE RING #G00-0917-2 46-968-001 51-178-001 40-304-001 ELECTRODE, INSULATOR LOWER 55-008-001 BELT SPAT 150 mm 150 mm 25 slot Aluminum wafer carrier.