Parts For Sale TEGAL 46-1015-001 TEGAL 46-1015-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-1015-001 Manufacturer TEGAL Part Number 46-1015-001 Description Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 7.0 US Other TEGAL Parts 58-073-001 46-879-001 39-853-005 74-101-001 39-894-001 39-956-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 46-278-004 50-056-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%