Parts For Sale TEGAL 46-1014-001 TEGAL 46-1014-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-1014-001 Manufacturer TEGAL Part Number 46-1014-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 58-073-001 46-1006-001 40-467-001 47-339-005 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 47-101-002 39-894-001 39-733-004 Tegal 903e lower electrode 52-047-002 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%