Parts For Sale TEGAL 46-1010-002 TEGAL 46-1010-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-1010-002 Manufacturer TEGAL Part Number 46-1010-002 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 47-634-001 37-221-002 UPPER ELECT ANOD, NON ANODIZED 161-0040K VALVE, INLINE VACUUM 46-776-003 40-395-001 RING, FLAT 6 37-411-001 58-043-004 46-272-003 46-1014-002