Parts For Sale TEGAL 46-1005-001 TEGAL 46-1005-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-1005-001 Manufacturer TEGAL Part Number 46-1005-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 37-181-001 46-879-001 38-023-001 COOLING RING 46-225-003 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 47-583-001 47-695-001 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 50-056-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%