Parts For Sale TEGAL 46-1005-001 TEGAL 46-1005-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-1005-001 Manufacturer TEGAL Part Number 46-1005-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 39-680-003 ELECTRODE, CONEHEAD VENTED 31-406-003 WAFER SENSOR ASSY-VCE 49-078-002 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 49-060-001 57-008-001 46-630-001 47-385-002 51-265-001 37-221-001 UPPER ELECT, .014 HOLE NO RAD.