Parts For Sale TEGAL 46-1004-001 TEGAL 46-1004-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-1004-001 Manufacturer TEGAL Part Number 46-1004-001 Description Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 9.0 US Other TEGAL Parts 47-634-001 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 46-776-003 46-1014-001 58-043-004 47-474-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-741-009 Tegal 903e lower electrode 80-202-297 BELT 1/4W 115GRV 80-202-297 A4T1 PAD ETCHER TEGAL 903E 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 46-272-003 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.