Parts For Sale TEGAL 44-664-004 TEGAL 44-664-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 44-664-004 Manufacturer TEGAL Part Number 44-664-004 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 39-741-004 ELECTRODE, LOWER 6" 33-349-004 ELECTRODE, CONDEHEAD UPPER 161-0040K VALVE, INLINE VACUUM 80-195-450 51-056-001 42-826-005 47-006-002 47-161-001 40-790-001 FOCUS RING 44-671-001