Parts For Sale TEGAL 42-964-007 TEGAL 42-964-007 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-964-007 Manufacturer TEGAL Part Number 42-964-007 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 37-181-001 46-879-001 40-481-002 Insulator Ring 80-650-053 ACTUATOR 44-757-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 47-583-001 40-295-003 FOCUS RING 47-695-001 39-733-004 Tegal 903e lower electrode 39-818-001 SLEEVE,FIBER OPTIC #39-818-001 A4T1 PAD ETCHER TEGAL 903E 50-056-001