Parts For Sale TEGAL 42-954-002 TEGAL 42-954-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-954-002 Manufacturer TEGAL Part Number 42-954-002 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 46-437-002 46-994-002 46-1006-001 80-650-053 ACTUATOR 47-526-001 46-735-002 51-191-001 47-672-001 40-140-001 RING, CERAMIC INSULATOR