Parts For Sale TEGAL 42-813-001 TEGAL 42-813-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-813-001 Manufacturer TEGAL Part Number 42-813-001 Description Status Available Approx. Qty 10 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 10.0 US Other TEGAL Parts 46-879-001 93-229-005 RF CABLE 901E 74-101-001 44-888-001 39-741-026 Tegal 903e lower electrode 39-956-001 42-960-003 44-957-001 150 mm 150 mm 25 slot Aluminum wafer carrier.