Parts For Sale TEGAL 42-664-001 TEGAL 42-664-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-664-001 Manufacturer TEGAL Part Number 42-664-001 Description Status Available Approx. Qty 16 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 16.0 US Other TEGAL Parts 46-879-001 44-888-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 42-683-001 99-287-003 SHUTTLE INTERFACE BOARD 39-956-001 42-960-003 44-957-001 50-056-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02