Parts For Sale TEGAL 42-664-001 TEGAL 42-664-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-664-001 Manufacturer TEGAL Part Number 42-664-001 Description Status Available Approx. Qty 16 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 16.0 US Other TEGAL Parts 58-073-001 37-221-002 UPPER ELECT ANOD, NON ANODIZED 99-247-003 SPATULA INTERFACE 80-650-053 ACTUATOR 40-467-001 47-339-005 39-741-026 Tegal 903e lower electrode 47-101-002 39-894-001 52-047-002 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02
