Parts For Sale TEGAL 42-663-002 TEGAL 42-663-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-663-002 Manufacturer TEGAL Part Number 42-663-002 Description Status Available Approx. Qty 22 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 22.0 US Other TEGAL Parts 46-879-001 93-229-005 RF CABLE 901E 44-888-001 42-683-001 39-956-001 42-960-003 93-123-006 BELT 39-741-009 Tegal 903e lower electrode 44-957-001 40-304-001 ELECTRODE, INSULATOR LOWER 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E