Parts For Sale TEGAL 42-663-002 TEGAL 42-663-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-663-002 Manufacturer TEGAL Part Number 42-663-002 Description Status Available Approx. Qty 22 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 22.0 US Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 37-411-001 42-899-001 44-888-001 51-228-001 46-272-003 46-1014-002 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 37-222-002 Cooling Plate
