Parts For Sale TEGAL 42-642-001 TEGAL 42-642-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-642-001 Manufacturer TEGAL Part Number 42-642-001 Description Status Available Approx. Qty 55 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 55.0 US Other TEGAL Parts 46-879-001 46-1006-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 44-888-001 47-583-001 39-761-001 44-957-001 50-056-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 150 mm 150 mm 25 slot Aluminum wafer carrier.