Parts For Sale TEGAL 42-641-002 TEGAL 42-641-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-641-002 Manufacturer TEGAL Part Number 42-641-002 Description Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 9.0 US Other TEGAL Parts 83-259-001 80-195-450 42-826-005 47-006-002 47-161-001 40-260-001 WINDOW, SAPPHIRE 1x2.5 44-203-005 40-304-001 ELECTRODE, INSULATOR LOWER 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 44-671-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 150 mm 150 mm 25 slot Aluminum wafer carrier.