Parts For Sale TEGAL 42-639-001 TEGAL 42-639-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-639-001 Manufacturer TEGAL Part Number 42-639-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 47-158-002 80-650-053 ACTUATOR 93-229-005 RF CABLE 901E 43-014-001 44-261-002 46-925-001 44-960-001 40-576-003-C Ring Ceramic Focus Castellated 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 47-445-001