Parts For Sale TEGAL 42-603-001 TEGAL 42-603-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-603-001 Manufacturer TEGAL Part Number 42-603-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 40-768-004 Insulator Ring 39-853-005 80-195-450 42-826-005 47-006-002 47-161-001 99-249-002 PCB TEGAL END POINT DETECTOR 44-203-005 40-790-001 FOCUS RING 80-202-357 O-Ring 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 44-671-001