Parts For Sale TEGAL 42-602-001 TEGAL 42-602-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-602-001 Manufacturer TEGAL Part Number 42-602-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 47-158-002 39-741-026 Tegal 903e lower electrode 43-014-001 44-261-002 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 46-925-001 44-960-001 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL 47-445-001