Parts For Sale TEGAL 42-571-002 TEGAL 42-571-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-571-002 Manufacturer TEGAL Part Number 42-571-002 Description Status Available Approx. Qty 24 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 24.0 US Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 83-259-001 40-467-001 47-339-005 39-741-026 Tegal 903e lower electrode 47-101-002 39-894-001 99-249-002 PCB TEGAL END POINT DETECTOR 52-047-002 40-576-003-C Ring Ceramic Focus Castellated 42-902-001