Parts For Sale TEGAL 42-542-001 TEGAL 42-542-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-542-001 Manufacturer TEGAL Part Number 42-542-001 Description Status Available Approx. Qty 34 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 34.0 US Other TEGAL Parts 40-768-006 Insulator Ring 46-776-003 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 44-888-001 58-043-004 46-272-003 40-260-001 WINDOW, SAPPHIRE 1x2.5 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 44-439-001 43-074-001