Parts For Sale TEGAL 42-509-002 TEGAL 42-509-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-509-002 Manufacturer TEGAL Part Number 42-509-002 Description Status Available Approx. Qty 64 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 64.0 US Other TEGAL Parts 46-879-001 42-667-001 46-1006-001 44-757-001 47-583-001 47-695-001 39-741-009 Tegal 903e lower electrode 50-056-001 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E