Parts For Sale TEGAL 42-464-001 TEGAL 42-464-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-464-001 Manufacturer TEGAL Part Number 42-464-001 Description Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 9.0 US Other TEGAL Parts 52-058-002 46-994-002 47-442-001 44-981-001 80-095-278 DAC SCAN BOARD 49-027-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 47-080-002 42-941-001