Parts For Sale TEGAL 42-417-002 TEGAL 42-417-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-417-002 Manufacturer TEGAL Part Number 42-417-002 Description Status Available Approx. Qty 79 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 79.0 US Other TEGAL Parts 58-073-001 31-406-003 WAFER SENSOR ASSY-VCE 40-467-001 47-339-005 47-101-002 39-894-001 99-287-003 SHUTTLE INTERFACE BOARD 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 52-047-002 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02