Parts For Sale TEGAL 42-362-002 TEGAL 42-362-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-362-002 Manufacturer TEGAL Part Number 42-362-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 99-247-003 SPATULA INTERFACE 47-155-001 40-374-006 46-787-002 46-912-002 47-639-001 47-080-003 39-741-009 Tegal 903e lower electrode 150 mm 150 mm 25 slot Aluminum wafer carrier.