Parts For Sale TEGAL 42-328-002 TEGAL 42-328-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-328-002 Manufacturer TEGAL Part Number 42-328-002 Description Status Available Approx. Qty 57 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 57.0 US Other TEGAL Parts 46-879-001 31-406-003 WAFER SENSOR ASSY-VCE 46-1006-001 44-888-001 42-683-001 39-956-001 42-960-003 44-957-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 150 mm 150 mm 25 slot Aluminum wafer carrier.
