Parts For Sale TEGAL 42-328-002 TEGAL 42-328-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-328-002 Manufacturer TEGAL Part Number 42-328-002 Description Status Available Approx. Qty 57 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 57.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 58-073-001 39-853-005 39-741-004 ELECTRODE, LOWER 6" 40-481-002 Insulator Ring 40-467-001 42-362-001 47-101-002 39-894-001 93-123-006 BELT 46-278-004
