Parts For Sale TEGAL 42-326-003 TEGAL 42-326-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-326-003 Manufacturer TEGAL Part Number 42-326-003 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 46-776-003 37-411-001 42-899-001 44-888-001 40-140-001 RING, CERAMIC INSULATOR 46-272-003 46-1014-002 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02