Parts For Sale TEGAL 42-324-001 TEGAL 42-324-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-324-001 Manufacturer TEGAL Part Number 42-324-001 Description Status Available Approx. Qty 64 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 64.0 US Other TEGAL Parts 58-073-001 40-395-002 Ring Ceramic 125C Castellated 40-481-002 Insulator Ring 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 42-362-001 47-101-002 39-894-001 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 52-047-002 40-790-001 FOCUS RING